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Performance Improved Vertical Diamond Schottky Barrier Diode With Fluorination-Termination Structure

MetadataDetails
Publication Date2019-06-14
JournalIEEE Electron Device Letters
AuthorsDan Zhao, Zhangcheng Liu, Juan Wang, Wenyang Yi, Ruozheng Wang
InstitutionsTaiyuan University of Science and Technology, Xi’an Jiaotong University
Citations13

We have demonstrated performance improved vertical diamond Schottky barrier diodes (SBDs) with fluorination-terminated (FT) structure. A turn-on voltage of 1.6 V, an on-resistance of 50.2 mΩ·cm <sup xmlns:mml=ā€œhttp://www.w3.org/1998/Math/MathMLā€ xmlns:xlink=ā€œhttp://www.w3.org/1999/xlinkā€&gt;2&lt;/sup> , a breakdown voltage of 117 V, and a breakdown field of 3.3 MV/cm are achieved for the SBD with an FT length of 20 μm. We verified that the SBD with FT structure could obtain lower turn-on voltage and larger breakdown field compared to that of the SBD without FT structure. The results show that the SBDs with FT structure have significant potential for future high-performance power electronics application.