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Temperature dependence of diamond MOSFET transport properties

MetadataDetails
Publication Date2020-01-28
JournalJapanese Journal of Applied Physics
AuthorsAboulaye Traoré, Hiromitsu Kato, Toshiharu Makino, Tsubasa Matsumoto, Norio Tokuda
InstitutionsNational Institute of Advanced Industrial Science and Technology, University of Tsukuba
Citations5

The electrical properties of p-channel diamond metal-oxide-semiconductor FETs (MOSFETs) have been investigated for temperatures ranging from 6.5 K to 673 K. Diamond MOSFETs exhibit typical normally-off MOSFET features from 6.5 K to 623 K. Despite the high impurity ionization energy in diamond (donor: 0.58 eV, acceptor: 0.38 eV), an inversion channel is formed in diamond MOSFETs at low temperature (up to 6.5 K). Moreover, the high-temperature measurements induce an irreversible shift in the threshold voltage of diamond MOSFETs (from −6.5 V to −3.15 V), leading to a significant improvement of the room temperature drain current. The threshold voltage shift results from a reduction of the total density of the extrinsic charges at Al2O3/diamond interface because of unintentional post-deposition annealing of the Al2O3 gate oxide at high temperature.