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Modeling, design, and simulation of Schottky diodes based on ultrananocrystalline diamond composite films

MetadataDetails
Publication Date2020-10-19
JournalSemiconductor Science and Technology
AuthorsMahmoud Shaban
Citations2

Abstract In this study, heterojunction diodes based on ultrananocrystalline diamond/hydrogenated amorphous carbon (UNCD/a-C:H) composite films, grown on Si substrates using the coaxial arc plasma deposition method, were modeled, characterized, and investigated. Calibrated material parameters, extracted from experimental analysis of nitrogen-doped (n-type) UNCD/a-C:H/p-type Si heterojunctions, were fed to the device model. Design of vertical geometry Pd/n-type UNCD/a-C:H Schottky diodes was proposed using a two-dimensional device simulator. Simulation results of diodes with field-plate termination exhibited a barrier height of 1 eV, turn-on voltage of 0.75 V, specific on-resistance ( R s,on ) of 70 mĪ© cm 2 , and breakdown voltage ( V BD ) of 270 V. This corresponds to the power figure of merit ( V BD 2 / R s,on ) of 1.04 MW cm āˆ’2 . The results offer a promising potential of using nitrogen-doped UNCD/a-C:H in power electronics devices.

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