Design routine and characterisation of a biconic deformable metal mirror for focus shifting
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2020-11-26 |
| Journal | Optics Express |
| Authors | Paul Bƶttner, Aoife Brady, Claudia Reinlein, Ramona Eberhardt, Stefan Nolte |
| Institutions | Fraunhofer Institute for Applied Optics and Precision Engineering |
| Citations | 3 |
Abstract
Section titled āAbstractāThis paper describes an opto-mechanical concept of a deformable metal mirror membrane, which can shift the focus position over a large range by use of a single actuator. The core element of the mirror is a diamond turned tulip-shaped membrane, the design is optimized to correct astigmatic aberrations which arise from the use of a curved mirror under a deflection angle. For this purpose, the target mirror surface is biconic. The manufactured mirror was tested with a maximum central deflection of 28 Āµm and, when used in combination with a 200 mm focal lens, is capable of producing a focus shift of up to 17.9 mm with a resulting wavefront aberration of 238.7 nm RMS error .