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6CCVD Research

Study of toxic gas adsorption on silicon substrate integrated with piezoelectric material for sensing application using COMSOL Multiphysics

At a Glance

Section titled ā€œAt a Glanceā€
MetadataDetails
Publication Date2021-02-01
JournalIOP Conference Series Materials Science and Engineering
AuthorsS. Akshya, A. Vimala Juliet
InstitutionsSRM Institute of Science and Technology
Citations2

Abstract

Section titled ā€œAbstractā€

Abstract This paper aims to study the analytical response of micro cantilever based gas sensor for the quantification of NOx gas molecules, simultaneously discussing the possibility of a different measurement technique. Numerous packed and digital gas sensors are available in the market, but each with its own limits. MEMS sensors provide smart working, portable, save space, and reusable. Hence the micro cantilever beam deposited with an active material such as palladium, reduced graphene oxide to monitor and obtain the concentration of NOx was identified in terms of deflection for deposited mass. The physics and study provided by COMSOL Multiphysics will be exploited for the current usage. Various materials such as silicon and diamond as a substrate were simulated and compared. This paper discussed about the different micro cantilever beam structures for the gas sensing mechanism and selects the better structure based on their deformation in structure due to applied mass. The excellent trapping substrate material for NOx is chosen. A new measurement technique using piezoelectric material will be discussed. The proposed method will be discussed based on their pros and cons by compared with other sensors. The drawbacks of the proposed technique are also highlighted. Overcoming the drawback of conventional measurement methodology and devising a novel sensor to make it compatible for gas sensing.

Tech Support

Section titled ā€œTech Supportā€

Original Source

Section titled ā€œOriginal Sourceā€

References

Section titled ā€œReferencesā€
  1. 2016 - Stochastic Resonance in MEMS Capacitive Sensors [Crossref]
  2. 2015 - Design of Microcantilever Beam for Vapour Detection using COMSOL Multiphysics Software
  3. 2014 - Cantilever based MEMS pressure sensor using different Piezoelectric Materials: A comparative study
  4. 1993 - The tin dioxide gas sensor [Crossref]
  5. 2005 - CO gas sensing from ultrathin nano-composite conducting polymer [Crossref]
  6. 2015 - Room Temperature CO Detection by Hybrid Porphyrin-ZnO nanoparticles [Crossref]
  7. 2007 - Fabrication of MEMS Composite-Polymer gas sensor arrays for electronic nose
  8. 2011 - SnO2 thin film sensor with enhanced response for NO2 gas at lower temperature [Crossref]

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