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Performance-Improved Vertical Zr/Diamond Schottky Barrier Diode With Lanthanum Hexaboride Interfacial Layer

MetadataDetails
Publication Date2021-07-26
JournalIEEE Electron Device Letters
AuthorsGuoqing Shao, Juan Wang, Zhangcheng Liu, Yanfeng Wang, Wei Wang
InstitutionsXi’an Jiaotong University
Citations15

We have demonstrated performance-improved vertical diamond Schottky barrier diode (SBD) by introducing a lanthanum hexaboride (LaB <sub xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”&gt;6&lt;/sub> ) interfacial layer between Zr and diamond. The composition of LaB <sub xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”&gt;6&lt;/sub> was characterized using X-ray photoelectron spectroscopy. The fabricated diamond SBD with LaB <sub xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”&gt;6&lt;/sub> delivers a rectification ratio of 10 <sup xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”&gt;10&lt;/sup> , a Schottky barrier height (SBH) of 1.53 eV, a saturation current density of 1.82×10 <sup xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”&gt;-19&lt;/sup> A/cm <sup xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”&gt;2&lt;/sup> , and a shunt resistance of 2.67×10 <sup xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”&gt;12&lt;/sup> Ω. These results indicate that with the inclusion of LaB <sub xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”&gt;6&lt;/sub> , diamond SBD exhibits improved SBH and reverse breakdown capability. Additionally, the trap-limited space-charge-limited current (SCLC) remains the determinant transport mechanism for diamond SBD with LaB <sub xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”&gt;6&lt;/sub> . Meanwhile, the interface states density is significantly reduced due to the effect of LaB <sub xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”&gt;6&lt;/sub> . These results suggest the great potential of vertical Zr/LaB <sub xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”&gt;6&lt;/sub> /p-diamond SBD as future high-performance power rectifiers.

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