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GaN-HEMTs on Diamond Prepared by Room-Temperature Bonding Technology

MetadataDetails
Publication Date2021-10-05
AuthorsShuichi Hiza, Yusuke Shirayanagi, Yuki Takiguchi, Kohei Nishimura, Takashi Matsumae
InstitutionsKumamoto University, Mitsubishi Electric (Japan)
Citations1

GaN-on-Diamond high electron mobility transistors were successfully fabricated by surface-activated room-temperature bonding technique. Various diamond substrates were finely polished and bonded to GaN-HEMTs by surface-activated room-temperature bonding. Fabricated devices showed superior characteristics in thermal dissipation compared to the device with conventional structure.