Impact of Laser‐Induced Graphitization on Diamond Schottky Barrier Diodes
At a Glance
Section titled “At a Glance”| Metadata | Details |
|---|---|
| Publication Date | 2022-10-01 |
| Journal | physica status solidi (a) |
| Authors | Tomoki Iwao, Phongsaphak Sittimart, Tsuyoshi Yoshitake, Hitoshi Umezawa, Shinya Ohmagari |
| Institutions | Kyushu University, National Institute of Advanced Industrial Science and Technology |
Abstract
Section titled “Abstract”Schottky Barrier Diodes Laser dicing is applied for diamond Schottky barrier diodes (SBDs) to develop the back-end process for future diamond electronics. The structural and electrical impact of laser-induced graphitization which takes place during the laser-dicing process is investigated by Shinya Ohmagari and colleagues in article number 2100846. Herein, an appropriate measure to minimize the influence of laser dicing on SBD properties is proposed.