Wide-field tomography imaging of a double circuit using NV center ensembles in a diamond
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2022-10-05 |
| Journal | Optics Express |
| Authors | Zhonghao Li, Yanling Liang, Chong Shen, Zhenrong Shi, Huanfei Wen |
| Institutions | North University of China |
| Citations | 14 |
Abstract
Section titled āAbstractāThe wide-field (2.42 mm Ć 1.36 mm, resolution: 5.04 Āµm) tomography imaging of double circuits is performed using nitrogen-vacancy (NV) center ensembles in a diamond. The magnetic-field distribution on the surface of the circuit produced by the lower layer is obtained. Vector magnetic superposition is used to separate the magnetic-field distribution produced by the lower layer from the magnetic-field distribution produced by two layers. An inversion model is used to perform the tomography imaging of the magnetic-field distribution on the lower layer surface. Compared with the measurements of the upper layer, the difference in the maximum magnetic-field intensity of inversion is approximately 0.4%, and the difference in the magnetic-field distribution of inversion is approximately 8%, where the depth of the lower layer is 0.32 mm. Simulations are conducted to prove the reliability of the imaging. These results provide a simple and highly accurate reference for the detection and fault diagnosis of multilayer and integrated circuits.