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A Microfabricated Diamond Quantum Magnetometer with Picotesla Scale Sensitivity

MetadataDetails
Publication Date2023-01-15
AuthorsFei Xie, Qihui Liu, Yuqiang Hu, Lingyun Li, Zhichao Chen
InstitutionsState Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology
Citations5

This research reports a microfabricated diamond quantum magnetometer based on ensemble nitrogen-vacancy (NV) centers. The sensor device is fabricated with a standard MEMS process and integrated with optical fiber and photodiode (PD). The sensitivity of the sensor and signal-to-noise ratio (SNR) are determined by the detection efficiency of photons emitted from NVs in bulk diamonds. The miniaturized and portable diamond sensor shows a 132-fold enhancement of fluorescence collection efficiency over the fiber confocal system and an unshielded sensitivity of 334 pT•Hz <sup xmlns:mml=ā€œhttp://www.w3.org/1998/Math/MathMLā€ xmlns:xlink=ā€œhttp://www.w3.org/1999/xlinkā€&gt;-1/2&lt;/sup> under ambient conditions. The essential sensor component is 1Ɨ1Ɨ0.1 cm <sup xmlns:mml=ā€œhttp://www.w3.org/1998/Math/MathMLā€ xmlns:xlink=ā€œhttp://www.w3.org/1999/xlinkā€&gt;3&lt;/sup> in volume. Sensors with improved integration and sensitivity are possible to be used for practical applications, such as magnetocardiography and precision current sensing.