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6CCVD Research

Ultrananocrystalline diamond films with optimized dielectric properties for advanced RF MEMS capacitive switches

At a Glance

Section titled ā€œAt a Glanceā€
MetadataDetails
Publication Date2023-01-23
JournalOSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information)
AuthorsAnirudha V. Sumant, Orlando Auciello, Derrick C. Mancini
Citations1

Abstract

Section titled ā€œAbstractā€

An efficient deposition process is provided for fabricating reliable RF MEMS capacitive switches with multilayer ultrananocrystalline (UNCD) films for more rapid recovery, charging and discharging that is effective for more than a billion cycles of operation. Significantly, the deposition process is compatible for integration with CMOS electronics and thereby can provide monolithically integrated RF MEMS capacitive switches for use with CMOS electronic devices, such as for insertion into phase array antennas for radars and other RF communication systems.

Tech Support

Section titled ā€œTech Supportā€

Original Source

Section titled ā€œOriginal Sourceā€

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