Utilizing a Maskless Process for Generating Quantum Emitter Arrays in Silicon Carbide
At a Glance
Section titled âAt a Glanceâ| Metadata | Details |
|---|---|
| Publication Date | 2023-01-01 |
| Authors | Hyemin Kim, YongâHoon Cho, YoungâHo Ko |
| Institutions | Korea Advanced Institute of Science and Technology, Electronics and Telecommunications Research Institute |
Abstract
Section titled âAbstractâPoint defects in silicon carbide are promising candidates for quantum applications as photonic and spin qubits. However, challenges remain in the effective and precise methods for creation of defect center. Here, we realized direct, maskless generation of nitrogen-vacancy center ensemble arrays in high purity 4H-SiC via helium FIB.