Diamond Semiconductor Devices, State of the Art of Material Growth and Device Processing
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2024-10-01 |
| Journal | IEEE RESOURCE CENTERS |
| Authors | Hitoshi Umezawa |
| Institutions | National Institute of Advanced Industrial Science and Technology |
Abstract
Section titled āAbstractāDiamond is known as an ultimate semiconductor material because of its superior properties and it is expected to be employed in next-generation power electronic devices. Progress in wafer technology and device processing techniques have improved the performance of semiconductor devices. In this paper, state of the art of diamond semiconductor devices, especially power devices and harsh environmental devices including wafer technologies will be introduced.