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Enhanced Threshold Voltage and Improved Subthreshold Swing Using NiOX/ITO Reverse Bias Gated Diamond pMOS

MetadataDetails
Publication Date2024-10-01
Journalphysica status solidi (RRL) - Rapid Research Letters
AuthorsSeetha Jeyakumar Ranie, Subrat Kumar Pradhan, Vivek Kumar Shukla, Kasturi Saha, Padmnabh Rai
InstitutionsUniversity of Mumbai, Center for Excellence in Basic Sciences

An increase in the device performance of diamond‐based p‐type metal-oxide-semiconductor (pMOS) transistors using a combination of p‐type nickel oxide and n‐type indium tin oxide (NiO X /ITO) reverse bias diode as the gate dielectric is reported. Negative threshold voltage pMOS transistors are desirable for digital circuits and power applications for fail‐safe operation. A Schottky gate‐based conventional diamond pMOS transistor suffers from many limitations, including a positive threshold voltage ( V T ). Herein, it is experimentally demonstrated that NiO X /ITO gate dielectric with Al gate contact circumvents many critical limitations, providing a negative threshold voltage of −1.2 V, improved subthreshold slope of 145 mV dec −1 , current ON/OFF ratio >10 7 , and peak gate leakage current reduction >10 3 . An Al/NiO X ‐based control gate structure shifts the V TH negative with improvements in crucial device performances. Adding a reverse bias junction through the Al/ITO/NiO X heterointerface with the Al metal gate further improves performance. The measured device characteristics are explained in a common framework of energy band diagram for all the devices.