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6CCVD Research

Design Method for Mode Matching of a Novel Diamond Honeycomb-Like Disk Resonator Gyroscope with High Shock Resistance

At a Glance

Section titled ā€œAt a Glanceā€
MetadataDetails
Publication Date2025-04-01
JournalJournal of Physics Conference Series
AuthorsHuimin Chen, Kai Wu, Qingsong Li, Dingbang Xiao, Xuezhong Wu

Abstract

Section titled ā€œAbstractā€

Abstract This paper presents a novel diamond honeycomb-like MEMS disk resonant gyroscope and the mode matching design method for it. By altering the width of the folded beams, the gyroscopeā€™s frequency can be adjusted to 30 kHz, which make it can withstand extremely high overload. Aiming to improve its performance, this paper proposed a method to realise mode matching by adjusting the drive or sense axis beam width. This research lays the foundation for the performance improvement of the diamond honeycomb high-overload MEMS gyroscope.

Tech Support

Section titled ā€œTech Supportā€

Original Source

Section titled ā€œOriginal Sourceā€

References

Section titled ā€œReferencesā€
  1. 2018 - Design and Implementation of a Dual-Mass MEMS Gyroscope with High Shock Resistance [Crossref]
  2. 2018 - A mode-matched force-rebalance control for a MEMS vibratory gyroscope [Crossref]
  3. 2020 - An FPGA-Based Interface System for High-Frequency Bulk-Acoustic-Wave Micro-gyroscopes With In-Run Automatic Mode-Matching [Crossref]
  4. 2015 - Tactical grade MEMS vibrating ring gyroscope with high shock reliability [Crossref]
  5. 2021 - Design and Optimization of a Vibrating Ring Gyroscope With High Shock Resistance by Differential Evolution
  6. 2011 - Vibration sensitivity analysis of MEMS vibratory ring gyroscopes [Crossref]
  7. 2014 - Boeing Disc Resonator Gyroscope
  8. 2018 - 0.04 degree-per-hour MEMS disk resonator gyroscope with high-quality factor (510 k) and long decaying time constant (74.9 s) [Crossref]
  9. 2022 - A Review of Symmetric Silicon MEMS Gyroscope Mode-Matching Technologies [Crossref]

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