Skip to content

PowderMEMS® magnets as enabler for miniaturized NV based quantum sensors and quantum processor architectures

MetadataDetails
Publication Date2025-08-23
JournalMicro and Nano Engineering
AuthorsM. Bähr, Björn Gojdka, Thomas Lisec, Niels Clausen, Mani Teja Bodduluri

The implementation of PowderMEMS® micromagnets of varying shapes, with lateral dimensions of 700 μm and 800 μm, into 2.3 × 2.3 × 0.525 mm3 silicon chips has been demonstrated successfully. These chips have been utilized as functionalized interposer for micro-scaled quantum devices. PowderMEMS® micromagnets offer a high biasing magnetic field flux density ranging from 30 mT to 35 mT over a distance of 100 μm depending on the size and shape of the micromagnets. This magnetic field strength (BZ) was proven by room temperature ODMR measurements with NV centers in diamond: BZ was measured over a range of distances, extending to 6 mm from the center of the micromagnets. The evaluation involved the analysis of Zeeman splitting. Furthermore, a Hall measurement setup was employed to map the lateral distribution of the magnetic field strength.

  1. 2014 - Magnetometry with nitrogen-vacancy defects in diamond [Crossref]
  2. 2016 - Microwave-free magnetometry with nitrogen-vacancy centers in diamond [Crossref]
  3. 2021 - Integrated and portable magnetometer based on nitrogen-vacancy ensembles in diamond [Crossref]
  4. 2022 - A pulsed lock-in method for DC ensemble nitrogen-vacancy center magnetometry [Crossref]
  5. 2013 - High-precision nanoscale temperature sensing using single defects in diamond [Crossref]
  6. 2014 - Electronic properties and metrology of the diamond NV- center under pressure [Crossref]
  7. 2014 - Evaluation of nitrogen- and silicon-vacancy defect centres as single photon sources in quantum key distribution [Crossref]
  8. 2018 - Efficient extraction of light from a nitrogen-vacancy center in a diamond parabolic reflector [Crossref]