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6CCVD Research

Fabrication of Diamond Submicron Lenses and Cylinders by ICP Etching Technique with SiO2 Balls Mask

At a Glance

Section titled ā€œAt a Glanceā€
MetadataDetails
Publication Date2019-05-17
JournalMaterials
AuthorsZongchen Liu, Tianfei Zhu, Yanfeng Wang, Irfan Ahmed, Zhangcheng Liu
InstitutionsTaiyuan University of Science and Technology, Xiā€™an Jiaotong University
Citations10

Abstract

Section titled ā€œAbstractā€

Submicron lenses and cylinders exhibiting excellent properties in photodetector and quantum applications have been fabricated on a diamond surface by an inductively-coupled plasma (ICP) etching technique. During ICP etching, a layer containing 500 nm diameter balls of SiO2 was employed as mask. By changing the mixing ratio of O2, Ar and CF4 during ICP etching, several submicron structures were fabricated, such as cylinders and lenses. The simulation results demonstrated that such submicron structures on a diamondā€™s surface can greatly enhance the photon out-coupling efficiency of embedded nitrogen-vacancy center.

Tech Support

Section titled ā€œTech Supportā€

Original Source

Section titled ā€œOriginal Sourceā€

References

Section titled ā€œReferencesā€
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  3. 2011 - Dynamical decoupling of a single-electron spin at room temperature [Crossref]
  4. 2010 - Single-Shot Readout of a Single Nuclear Spin [Crossref]
  5. 2012 - Room-Temperature Quantum Bit Memory Exceeding One Second [Crossref]
  6. 2016 - Diamond Quantum Devices in Biology [Crossref]
  7. 2016 - One- and Two-Dimensional Nuclear Magnetic Resonance Spectroscopy with a Diamond Quantum Sensor [Crossref]
  8. 2015 - High-sensitivity temperature sensing using an implanted single nitrogen-vacancy center array in diamond [Crossref]
  9. 2017 - Direct Nanoscale Sensing of the Internal Electric Field in Operating Semiconductor Devices Using Single Electron Spins [Crossref]
  10. 2018 - Nanoscale electrical conductivity imaging using a nitrogen-vacancy center in diamond [Crossref]

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