Miniaturized Diamond Quantum Magnetometer with Integrated Laser Source and All Electrical I/OS
At a Glance
Section titled “At a Glance”| Metadata | Details |
|---|---|
| Publication Date | 2024-01-21 |
| Authors | Fei Xie, Zhichao Chen, Peng Xiao, Qihui Liu, Lingyun Li |
| Institutions | State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology |
| Citations | 3 |
Abstract
Section titled “Abstract”This research reports a MEMS chip-scale diamond quantum magnetometer based on ensemble nitrogen-vacancy (NV) centers with integrated laser source and all electrical I/Os. The sensor module consists of a transistor outline (TO) packaged 532-nm diode-pumped solid state (DPSS) laser, a glass case, a diamond sensor device and a PCB. MEMS standard process is employed to integrate four key components of the sensor module, including diamond chip, microwave (MW) transmission line, long pass filter (LPF) and photodiode (PD) —in a volume of 0.26 cm <sup xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”>3</sup> . We demonstrate that the sensitivity of the diamond quantum magnetometer is inversely proportional to the diameter of the laser spot. The prototype of the proposed diamond quantum magnetometer has an optimized sensitivity of 312 pTꞏHz <sup xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”>-1/2</sup> with a fluorescence conversion efficiency of 1.70%, a total volume of 2.39 cm <sup xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”>3</sup> and a power consumption of 1.05 W, which enables a wide range of industrial and biological sensing applications.